JPS63140359U - - Google Patents
Info
- Publication number
- JPS63140359U JPS63140359U JP1987034667U JP3466787U JPS63140359U JP S63140359 U JPS63140359 U JP S63140359U JP 1987034667 U JP1987034667 U JP 1987034667U JP 3466787 U JP3466787 U JP 3466787U JP S63140359 U JPS63140359 U JP S63140359U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- substrate
- link
- holder
- horizontal links
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987034667U JPS63140359U (en]) | 1987-03-09 | 1987-03-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987034667U JPS63140359U (en]) | 1987-03-09 | 1987-03-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63140359U true JPS63140359U (en]) | 1988-09-14 |
Family
ID=30843440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987034667U Pending JPS63140359U (en]) | 1987-03-09 | 1987-03-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63140359U (en]) |
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1987
- 1987-03-09 JP JP1987034667U patent/JPS63140359U/ja active Pending